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Development of novel electron microscopy techniques to extract obscured information on material properties

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NIMS researchers Bo Da (researcher at the RCAMC and the CMI2, MaDIS) and Hideki Yoshikawa (leader of the Surface Chemical Analysis Group) and a research group led by Shigeo Tanuma (NIMS Special Researcher), Kazuhito Tsukakoshi (MANA Principal Investigator, NIMS), Kazuyuki Watanabe (Professor, Tokyo University of Science) and Zejun Ding (Professor, University of Science and Technology of China) jointly developed versatile spectroscopic microscopy techniques capable of simultaneously measuring a nano-thin film at a wide range of electron energy levels, from almost zero energy to high energy, using a microscope employing electron beams. The group also demonstrated the effectiveness of the technique.

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